diff --git a/Makefile b/Makefile
index f9e62d7e..a3a6d320 100644
--- a/Makefile
+++ b/Makefile
@@ -67,9 +67,10 @@ clean:
 	$(RM) $(OBJ) tree-sitter.pc libtree-sitter.a libtree-sitter.$(SOEXT)
 
 install: all
-	install -Dm644 lib/include/tree_sitter/api.h '$(DESTDIR)$(INCLUDEDIR)'/tree_sitter/api.h
-	install -Dm644 tree-sitter.pc '$(DESTDIR)$(PCLIBDIR)'/tree-sitter.pc
-	install -Dm644 libtree-sitter.a '$(DESTDIR)$(LIBDIR)'/libtree-sitter.a
+	install -d '$(DESTDIR)$(INCLUDEDIR)'/tree_sitter '$(DESTDIR)$(PCLIBDIR)' '$(DESTDIR)$(LIBDIR)'
+	install -m644 lib/include/tree_sitter/api.h '$(DESTDIR)$(INCLUDEDIR)'/tree_sitter/
+	install -m644 tree-sitter.pc '$(DESTDIR)$(PCLIBDIR)'/
+	install -m644 libtree-sitter.a '$(DESTDIR)$(LIBDIR)'/
 	install -m755 libtree-sitter.$(SOEXT) '$(DESTDIR)$(LIBDIR)'/libtree-sitter.$(SOEXTVER)
 	ln -sf libtree-sitter.$(SOEXTVER) '$(DESTDIR)$(LIBDIR)'/libtree-sitter.$(SOEXTVER_MAJOR)
 	ln -sf libtree-sitter.$(SOEXTVER_MAJOR) '$(DESTDIR)$(LIBDIR)'/libtree-sitter.$(SOEXT)
diff --git a/cli/src/generate/templates/makefile b/cli/src/generate/templates/makefile
index 522c1fad..a619057e 100644
--- a/cli/src/generate/templates/makefile
+++ b/cli/src/generate/templates/makefile
@@ -85,9 +85,10 @@ $(SRC_DIR)/parser.c: grammar.js
 	$(TS) generate --no-bindings
 
 install: all
-	install -Dm644 bindings/c/$(LANGUAGE_NAME).h '$(DESTDIR)$(INCLUDEDIR)'/tree_sitter/$(LANGUAGE_NAME).h
-	install -Dm644 $(LANGUAGE_NAME).pc '$(DESTDIR)$(PCLIBDIR)'/$(LANGUAGE_NAME).pc
-	install -Dm755 lib$(LANGUAGE_NAME).a '$(DESTDIR)$(LIBDIR)'/lib$(LANGUAGE_NAME).a
+	install -d '$(DESTDIR)$(INCLUDEDIR)'/tree_sitter '$(DESTDIR)$(PCLIBDIR)' '$(DESTDIR)$(LIBDIR)'
+	install -m644 bindings/c/$(LANGUAGE_NAME).h '$(DESTDIR)$(INCLUDEDIR)'/tree_sitter/
+	install -m644 $(LANGUAGE_NAME).pc '$(DESTDIR)$(PCLIBDIR)'/
+	install -m644 lib$(LANGUAGE_NAME).a '$(DESTDIR)$(LIBDIR)'/
 	install -m755 lib$(LANGUAGE_NAME).$(SOEXT) '$(DESTDIR)$(LIBDIR)'/lib$(LANGUAGE_NAME).$(SOEXTVER)
 	ln -sf lib$(LANGUAGE_NAME).$(SOEXTVER) '$(DESTDIR)$(LIBDIR)'/lib$(LANGUAGE_NAME).$(SOEXTVER_MAJOR)
 	ln -sf lib$(LANGUAGE_NAME).$(SOEXTVER_MAJOR) '$(DESTDIR)$(LIBDIR)'/lib$(LANGUAGE_NAME).$(SOEXT)